Special Offers

Special Offers

Special offers are limited in number and time and only available on a first come first serve basis.

1. TC-HAR5  -  Tilt Corrected High Aspect Ratio Tip

 

 

   For step height measurements of high aspect ratio structures. Tip tilt compensates AFM specific cantilever tilt.

Specifications:
Spike:
Aspect ratio:
Typ. full cone angle:
Radius
> 2 µm on pedestal
> 5 : 1
~ 8°
< 20 nm, typ. 10 nm

 One pack includes 5 cantilever chips.


Available cantilever:
tilt angle: 10° ± 2°
l = 450 µm, C = 0.2 N/m, fo = 15 kHz

 

2. CDR 120  -  Critical Dimension re-entrant Tip

 Flared CD metrology tips for Veeco’s X3D and Insight systems and similar tools.

   Specifications:
 Tip width:
Overhang:
Effective length:
90 to 120 nm
> 5 nm
> 500 nm

One pack includes 5 cantilever chips.


Available cantilever
l = 125 µm, C = 40 N/m, fo = 300 kHz

 

3. CDR 70  -  Critical Dimension re-entrant tip

 Flared CD metrology tips for Veeco’s X3D and Insight systems and similar tools.

   Specifications:
 Tip width:
Overhang:
Effective length:
57 to 70 nm
> 5 nm
> 450 nm

One pack includes 5 cantilever chips.


Available cantilever
l = 125 µm, C = 40 N/m, fo = 300 kHz

 

Articles Price Price incl.
19% VAT
Delivery minimum order quantity: 1
TC-HAR5 ( 450C0.2 - R )
5 Pack
150,00 € 178,50 €
for higher order quantity please get quote
last modified: 22.04.2010 09:36
We accept payment by bank transfer, cheque and PayPal.

Team Nanotec GmbH, Wilhelm-Schickardt-Str. 10, 78052 Villingen-Schwenningen, Germany, Phone +49-(0)7721-8863-3, Fax +49-(0)7721-8863-40, Email info@team-nanotec.de

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