Critical Dimension re-entrant tip
These tips are widely used in Bruker’s X-3D and Insight - Systems.
Typical application of CDR - Tips are measurements of:
- line width,
- trench width,
- side wall roughness,
- slope angle,
- trench depth, and
- step height
Tip Apex Specifications
| Type |
Tip width
[nm] |
Overhang
[nm] |
Effective length
[nm] |
| CDR 850 |
650 - 850 |
100 - 150 |
5000 - 7500 |
| CDR 300 |
200 - 300 |
13 - 25 |
1000 - 1500 |
| CDR 130 S |
110 - 140 |
13 - 25 |
250 - 350 |
| CDR 120 |
100 - 130 |
5 - 15 |
500 - 700 |
| CDR 70 |
57 - 70 |
5 - 11 |
450 - 550 |
| CDR 70 S |
57 - 70 |
5 - 11 |
350 - 450 |
| CDR 50 |
40 - 50 |
5 - 8 |
250 - 350 |
| CDR 50 S |
40 - 50 |
5 - 8 |
190 - 260 |
| CDR 32 |
27 - 32 |
3 - 5 |
180 - 220 |
| CDR 32 S |
27 - 32 |
3 - 5 |
130 - 180 |
The "C" in the ordering code denotes carbon coating for improved wear characteristics.
Please let us know if you have special needs for tip width, overhang, or effective length.
Each probe is individually quality inspected by imaging in a SEM. A certificate with measurement values and images will be provided (a sample can be found in the document section).
CDR probes are shipped in packs of 5 tips.
